Thin Film System TFS NX300 for industrial surface passivation of c-Si solar cells
The Beneq TFS NX300 is an application-specific system designed for fully-automated industrial production of surface passivation on crystalline silicon (c-Si) solar cell wafers. The batch size enables an hourly throughput of 2000 wafers (double-side coating).
Being an application-specific system, more information related to the TFS NX300 can be found under the application page for Surface passivation for c-Si solar cells.
|Batch size||250 wafers|
|Wafer size||156 × 156 (mm)|
|Film thickness||10 nm|