Thin Film System TFS NX300 for industrial surface passivation of c-Si solar cells

The Beneq TFS NX300 is an application-specific system designed for fully-automated industrial production of surface passivation on crystalline silicon (c-Si) solar cell wafers. The batch size enables an hourly throughput of 2000 wafers (double-side coating).

More information

Being an application-specific system, more information related to the TFS NX300 can be found under the application page for Surface passivation for c-Si solar cells.

Coating specifications

 Batch size  250 wafers
 Wafer size  156 × 156 (mm)
 Film thickness  10 nm
 Throughput  2000 wafers/hour