TFS 1200, an application-specific system from Beneq, has been specifically designed for industrial in-line and batch production of buffer layer coatings on copper-indium-gallium-diselenide (CIGS) thin film solar cells. The maximum substrate size is 1200 × 1200 (mm), a world-record in substrate size in ALD.

Specifications

Coating specifications for this system are as follows:

Materials Zn(O,S)
(Zn,Mg)O (optional)
Thickness 20 – 50 nm
Process temperature 120 – 130 °C
Throughput and productivity
(for Beneq TFS 1200 in-line coating system)
Panel amount: 5 panels/h (for 50 nm Zn(O,S) coating)
max. panel size: 1200 × 1200 (mm)
annual capacity: ≈ 6.5 MWp/a
Throughput and productivity Beneq TFS 1200 B off-line batch module (8 substrates each) Panel amount: 60 panels/h (for 50 nm Zn(O,S) coating)
max. panel size: 1200 x 1600 (mm)
annual capacity: ≈ 140 MWp/a