Based on significant improvement, the Semilab PMR-3000 enables in-line monitoring of implant/anneal processes on product wafers for immediate, accurate, and low-cost production control of implant and RTP systems and in-line monitoring for pre and post anneal implant.PMR-3000

Value Proposition

  • Non-contact optical method measures directly on product wafers à low cost, lower cycle time, represents true product results
  • Quickly locates source of implant/anneal module problems by providing both implant dose and RTP control measurements
  • Highest throughput in market for production monitoring applications
  • New advanced optics designed for high stability, MTBF and MTTR

Applications:

  • Implant dose monitoring
  • Junction depth and anneal process monitoring
  • Amorphous depth process monitoring