Referenced Spectroscopic Ellipsometer – nanofilm_rse
The nanofilm_RSE is a special type of ellipsometer, which compares the sample to a reference. In this way, the ellipsometric difference between sample and reference can be measured. Due to the orientation of the reference, none of the optical components need to be moved or modulated during measurement, and the full high resolution spectrum can be obtained in a single-shot measurement. This way 100 spectra per second are acquired. The synchronized x-y stage enables acquisition of large field film thickness maps within a few minutes.
The referenced spectroscopic ellipsometer combines the high sensitivity and layer thickness region of an Ellipsometer (0.1nm-10µm) with highest speed available on the market. In comparison to a laser ellipsometer it includes the spectroscopic information between 450 and 900 nm. This is important in the event that more than one parameter of the processed layer is variable like for example thickness and optical density.