LST is a powerful tool for monitoring bulk micro defect (BMD) profile of silicon samples. The BMD scatters the incident light which is recorded by a CCD camera near to the cleaved edge of the LST-300Asample.


  • DZ determination from one image concentration distribution along the wafer diameter within minutes
  • Depth resolution: 0.5µm
  • First particle detected within 0.5µm from the surface
  • Fully automatic operation including half wafer handling
  • Autofocusing on the cleaved surface