LST is a powerful tool for monitoring bulk micro defect (BMD) profile of silicon samples. The BMD scatters the incident light which is recorded by a CCD camera near to the cleaved edge of the sample.
- DZ determination from one image concentration distribution along the wafer diameter within minutes
- Depth resolution: 0.5µm
- First particle detected within 0.5µm from the surface
- Fully automatic operation including half wafer handling
- Autofocusing on the cleaved surface