IPA Dryers

  • The IPA dryer serves to rinse and dry hydrohilic and hydrophobic wafers and substrates.
  • Dryer suitable for taking 1x 8” Carrier or 2x 6” Carrier
  • Stress free drying without staining
  • Minimized IPA consumption
  • Small Footprint
  • High security standard

ARTOS Box Cleaner

  • Typ Artos 300
  • Box & Carrier Cleaner
  • Parts cleaning for Boxes, Carriers, Foups und Fosps
  • The Artos 300 is an innovative cleaning system which allows uncomplicated cleaning and drying of boxes and carriers of various sizes.
  • The system is separated into following main areas:
  • Process chamber with carousel
  • Tank tube and piping area
  • Electrical cabinet
  • pneumatic cabinet
  • On top module with fan, heater, door operator and carousel drive
  • The main construction of the ARTOS system can separate into 2 pieces to make sure that the system fits into the current clean room standard measurements and to simplify the assembly on-site.

SRD Spin Rinse Dryer Toptable

  • Safety emergency-off for Process Drum Heating
  • Safety emergency-off for Nitrogen Heating
  • Operating completely from the Front Side
  • Reliable Servomotor Safe Stop, EN954-1, category 3
  • The Spin Rinse Dryer is suitable for rinsing and drying of substrates up to 12″ round respectively 7″ square.
  • Standard rotors and customized rotors for your specific requirements are available. Rotors can be exchanged easily and quickly.
  • Tank heating at the process bowl. Process chamber made of stainless steel, electropolished. Nitrogen heating is included.
  • Main switch at the front side, mechanical door lock, PLC, colored Touchscreen and a brushless servomotor are part of the standard equipment